Illustrate:

Titanium silicon targets are used for wear-resistant coatings, for example: cutting tools.

Delivery form:
Sputtering targets or arc cathodes, in a single body, round targets up to Ø220 mm
Under a single body, a rectangular target with a maximum width of 200 mm and a maximum length of 1100 mm.

Metal purity ≥ 99.6%

Titanium-silicon composition ratio:
90:10 at％
85:15 at％
80:20 at％